Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology
- Publication Type
- Book chapter
- Authors
- Ahmed Awad
- Atsushi Takahashi
- Chikaaki Kodama
- Title
- Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology
- Chapter Title
- Optical Proximity Correction (OPC) Under Immersion Lithography
- Publish Date
- May 5, 2018
- ISBN-10
- --
- ISBN-13
- 978-1-78923-031-4
- Publisher
- Intech Open Science
- Publisher Country
- --